Container Having Multiple Compartments Containing Liquid Material for Multiple Wafer-Processing Chambers
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United States of America Patent
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Issued Date -
Jan 17, 2013
app pub date -
Jul 12, 2011
filing date -
Jul 12, 2011
priority date (Note) -
Abandoned
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Abstract
A container for containing a liquid material for processing a wafer includes: a container body; a divider dividing the interior of the container body and defining compartments fluid-tightly sealed off from each other except for bottom portions of the compartments; gas inlet ports for introducing gas to the respective compartments and gas outlet ports for discharging gas from the respective compartments; and a liquid level sensor provided in one of the compartments for keeping a liquid surface of a liquid material above the bottom portions when the container is in use conditions.
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