Optical Component Fabrication Using Coated Substrates

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United States of America Patent

SERIAL NO

13617652

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Abstract

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A method of fabricating or preparing an optical component, such as a mirror, using an amorphous oxide coated substrate is presented. An amorphous oxide coating is applied to an optical substrate. An assessment of surface roughness of the coated surface is performed. The coated surface is polished based on the assessment. Initial assessments can be conducted and polishing can be performed based on those initial assessments prior to applying the coating to better prepare the surface for the coating. Each assessment can assess the surface's Mid-Spatial Frequency Roughness (MSFR), High-Spatial Frequency Roughness (HSFR), or both. The performing of the assessments, polishing and/or coating can be computer-controlled. This process is ideal in the fabrication of an optical component formed from a substrate with a near-zero coefficient of thermal expansion. An optical component fabricated in this manner is also presented.

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ASML HOLDING N VDE RUN 6501 VELDHOVEN 5504 DR

International Classification(s)

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  • 2012 Application Filing Year
  • B05D Class
  • 2126 Applications Filed
  • 979 Patents Issued To-Date
  • 46.05 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances2012201320142015201620172018201920202021202220230255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
GIRARD, Joseph Paul Luc Benicia, US 3 22
Kennon, James Benicia, US 6 76
Kestner, Robert N Concord, US 3 22
Marchetti, Louis Andrew Albany, US 3 22

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  • 21 Citation Count
  • B05D Class
  • 87.90 % this patent is cited more than
  • 12 Age
Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges11466316762191310104111001 - 1011 - 2021 - 3031 - 4041 - 5051 - 6061 - 7071 - 8081 - 9091 - 100100 +050100150200250300350400450500550600650700

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