Optical Component Fabrication Using Coated Substrates
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United States of America Patent
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N/A
Issued Date -
N/A
app pub date -
Sep 14, 2012
filing date -
May 11, 2007
priority date (Note) -
Abandoned
status (Latency Note)
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Importance

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Abstract
A method of fabricating or preparing an optical component, such as a mirror, using an amorphous oxide coated substrate is presented. An amorphous oxide coating is applied to an optical substrate. An assessment of surface roughness of the coated surface is performed. The coated surface is polished based on the assessment. Initial assessments can be conducted and polishing can be performed based on those initial assessments prior to applying the coating to better prepare the surface for the coating. Each assessment can assess the surface's Mid-Spatial Frequency Roughness (MSFR), High-Spatial Frequency Roughness (HSFR), or both. The performing of the assessments, polishing and/or coating can be computer-controlled. This process is ideal in the fabrication of an optical component formed from a substrate with a near-zero coefficient of thermal expansion. An optical component fabricated in this manner is also presented.
First Claim
all claims..Other Claims data not available
Family
Country | kind | publication No. | Filing Date | Type | Sub-Type |
---|---|---|---|---|---|
US | A1 | US20080280539 | May 11, 2007 | Patent | Application |
Type : Patent Sub-Type : Application | |||||
FIRST PUBLISHED PATENT APPLICATION | Optical component fabrication using amorphous oxide coated substrates | Nov 13, 2008 | |||
JP | B2 | JP4769844 | May 09, 2008 | Patent | Grant |
Type : Patent Sub-Type : Grant | |||||
PUBLISHED GRANTED PATENT (SECOND LEVEL) | OPTICAL COMPONENT FABRICATION USING COATED SUBSTRATE | Sep 07, 2011 | |||
US | A1 | US20080318066 | May 12, 2008 | Patent | Application |
Type : Patent Sub-Type : Application | |||||
FIRST PUBLISHED PATENT APPLICATION | Optical Component Fabrication Using Coated Substrates | Dec 25, 2008 |
- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
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ASML HOLDING N V | DE RUN 6501 VELDHOVEN 5504 DR |
International Classification(s)

- 2012 Application Filing Year
- B05D Class
- 2126 Applications Filed
- 979 Patents Issued To-Date
- 46.05 % Issued To-Date
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
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GIRARD, Joseph Paul Luc | Benicia, US | 3 | 22 |
# of filed Patents : 3 Total Citations : 22 | |||
Kennon, James | Benicia, US | 6 | 76 |
# of filed Patents : 6 Total Citations : 76 | |||
Kestner, Robert N | Concord, US | 3 | 22 |
# of filed Patents : 3 Total Citations : 22 | |||
Marchetti, Louis Andrew | Albany, US | 3 | 22 |
# of filed Patents : 3 Total Citations : 22 |
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Patent Citation Ranking
- 21 Citation Count
- B05D Class
- 87.90 % this patent is cited more than
- 12 Age
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Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
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Fee | Large entity fee | small entity fee | micro entity fee |
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Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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