METHOD AND APPARATUS FOR MEASURING THE POWER OF A POWER GENERATOR WHILE OPERATING IN VARIABLE FREQUENCY MODE AND/OR WHILE OPERATING IN PULSING MODE
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United States of America Patent
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Jun 30, 2011
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Jun 30, 2011
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Abstract
Methods and apparatuses are disclosed for measuring electrical characteristics of power that is applied to a plasma processing chamber when the electrical generator operates in a pulsing mode, when the electrical generator operates in a variable frequency mode, and when the electrical generator operates in both a pulsing mode and in a variable frequency mode concurrently.
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