SELF-SUPPORTING FILM, SELF-SUPPORTING STRUCTURE, METHOD FOR MANUFACTURING SELF-SUPPORTING FILM, AND PELLICLE
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United States of America Patent
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Issued Date -
Jan 3, 2013
app pub date -
Apr 13, 2011
filing date -
Apr 13, 2010
priority date (Note) -
Abandoned
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Abstract
Provided is a self-supporting film that has an anti-reflection function independently, so that the self-supporting film exhibits excellent optical characteristics as a result. A self-supporting film has a rugged-structure layer having periodic rugged shapes formed on a surface thereof, with these periodic rugged shapes being formed on at least one surface. The average thickness of the self-supporting film ranges from 0.2 μm to 20.0 μm. The rugged-structure layer has a yield strain of 1% or greater and a tensile elongation of 10% or greater.
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