CASSETTE JIG FOR WAFER CLEANING APPARATUS AND CASSETTE ASSEMBLY HAVING THE SAME
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United States of America Patent
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Issued Date -
Jan 3, 2013
app pub date -
Jul 15, 2010
filing date -
Jan 22, 2010
priority date (Note) -
Abandoned
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Abstract
A cassette jig for a wafer cleaning apparatus is provided, comprising a jig body having an inner space designed to receive a first wafer therein; and a guide member mounted in the jig body and operative to guide a cassette to be installed in the jig body, the cassette having an inner space designed to receive a second wafer of a relatively smaller diameter than the first wafer therein.
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