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Abstract

A user-friendly multi-layer micro/nanofluidic flow device and micro/nano fabrication process are provided for numerous uses. The multi-layer micro/nanofluidic flow device can comprise: a substrate, such as indium tin oxide coated glass (ITO glass); a conductive layer of ferroelectric material, preferably comprising a PZT layer of lead zirconate titanate (PZT) positioned on the substrate; electrodes connected to the conductive layer; a nanofluidics layer positioned on the conductive layer and defining nanochannels; a microfluidics layer positioned upon the nanofluidics layer and defining microchannels; and biomolecular nanovalves providing bio-nanovalves which are moveable from a closed position to an open position to control fluid flow at a nanoscale. The micro/nano fabrication process for fabricating a multi-layer micro/nanofluidic flow device can comprise: forming a conductive layer on a substrate; forming an electrode pattern; forming a nanofluidics layer with a nanochannel pattern to define nanochannels; forming a microfluidics layer with a microchannel pattern to define microchannels; and assembling the microfluidics layer on the nanofluidics layer. The micro/nano fabrication process can include: synthesizing a thin film of PZT on ITO glass, electron beam lithography, sputtering, spin-coating, photolithography, and plasma treatment.

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First Claim