CLEANING TOOL FOR POLYSILICON REACTOR

United States of America Patent

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Issued Date
Jan 3, 2013
app pub date
Jun 27, 2012
filing date
Jun 29, 2011

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Abandoned

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Abstract

Systems and methods are provided for cleaning an interior surface of a chemical vapor deposition reactor bell used in the production of polysilicon.

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Patent Owner(s)

Patent Owner	Address
MEMC ELECTRONIC MATERIALS SPA	NOVARA

International Classification(s)

B08B:CLEANING IN GENERAL; PREVENTION OF FOULING IN GENE....

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[Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Bovio, Ezio	Bellinzago Novarese, IT	10	34
Gava, Diego	Merano, IT	2	11
Molino, Paolo	Lana, IT	4	13

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CLEANING TOOL FOR POLYSILICON REACTOR

Number of patents in Portfolio can not be more than 2000

United States of America Patent

13534137

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13534137

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