Carbon-Based Composite Material and Method for Fabricating the Same
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United States of America Patent
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Issued Date -
Dec 27, 2012
app pub date -
Jan 24, 2012
filing date -
Jun 24, 2011
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Abandoned
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Abstract
A method for fabricating a carbon-based composite material includes: (a) forming over a substrate a seeding layer that includes amorphous carbon matrix, and a plurality of ultra-nanocrystalline diamond grains; and (b) growing crystal grains over the seeding layer under a hybrid plasma to obtain the carbon-based composite material. The hybrid plasma is produced by ionization of a gas mixture. The gas mixture includes a hydrocarbon gas, H2, and an inert gas in a volume ratio of 1:(99−x):x based on 100 parts of the total volume of the gas mixture, and x satisfies 45
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