EPTAXIAL SUBSTRATE, METHOD FOR MAKING THE SAME AND METHOD FOR GROWING EPITAXIAL LAYER USING THE SAME
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United States of America Patent
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Issued Date -
Dec 27, 2012
app pub date -
Dec 23, 2011
filing date -
Jun 24, 2011
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An epitaxial substrate is provided, the epitaxial substrate is used to grow epitaxial layer. The epitaxial substrate includes a base having a number of grooves to form a patterned epitaxial growth surface. The patterned epitaxial growth surface is referred as an epitaxial growth surface. A carbon nanotube layer covers on the epitaxial growth surface, and the carbon nanotube layer corresponding to the grooves is suspended on the epitaxial substrate.
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