SUBSTRATE FRAME SUCTION APPARATUS AND CONTROL METHOD FOR THE SAME
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United States of America Patent
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Issued Date -
Dec 13, 2012
app pub date -
Jun 5, 2012
filing date -
Jun 7, 2011
priority date (Note) -
Abandoned
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Abstract
In one embodiment, a substrate frame suction apparatus includes a body having at least one top-side opened chamber, a suction plate to cover a top of the at least one chamber, and a pressure adjustment device connected to the at least one chamber and configured to adjust a pressure in the at least one chamber.
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