Method for the Application of a Conformal Nanocoating by Means of a Low Pressure Plasma Process
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Issued Date -
Dec 6, 2012
app pub date -
Jan 21, 2011
filing date -
Jan 22, 2010
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Abstract
The invention relates to a conformal nanocoating applied by a low pressure plasma process. The invention also relates to a method for making such a conformal nanocoating on a three-dimensional nanostructure, in particular a three-dimensional structure containing electrically conductive and non-conductive elements.
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