OPTICAL INTERFEROMETER SYSTEM WITH DAMPED VIBRATION AND NOISE EFFECT PROPERTY
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United States of America Patent
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Issued Date -
Dec 6, 2012
app pub date -
Nov 3, 2011
filing date -
May 30, 2011
priority date (Note) -
Abandoned
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Abstract
The present invention relates to an optical interferometer system with a damped vibration and noise effect property, in which a direct attachment of a partial reflecting film and an object to be measured may be used to damp a vibration and noise effect, thereby implementing a high-resolution optical shape measuring system. The optical interferometer system comprises an optical interferometer having a reference signal generating means attached to be spaced apart from an object to be measured by a predetermined distance, wherein the optical interferometer allows a reference signal and a measuring signal reflected from each boundary surface of the object to be measured to have an identical vibration and noise so that the vibrations and noises of the reference and measuring signals are canceled from each other; and a light receiving unit for measuring the object to be measured using an optical inference signal transmitted from the optical interferometer.
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