BUBBLER ASSEMBLY AND METHOD FOR VAPOR FLOW CONTROL
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United States of America Patent
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Issued Date -
Dec 6, 2012
app pub date -
May 31, 2011
filing date -
May 31, 2011
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
Disclosed is a bubbler assembly. The bubbler assembly includes a vessel configured to contain a liquid source material and its vapor. It also includes a carrier gas supply line, a downstream end of which discharges in a lower portion of the vessel, and a gas outlet line, an upstream end of which is in fluid communication with an upper portion of the vessel. The gas outlet line includes a constriction. The bubbler assembly further includes a pressurizing gas supply line, a downstream end of which discharges in either the upper portion of the vessel or in the gas outlet line at a point upstream of the constriction.
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