AUTOMATED MODEL BUILDING AND MODEL UPDATING

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United States of America Patent

APP PUB NO 20120303142A1
SERIAL NO

13568881

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Abstract

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A system and computer-implemented method for creating a new model or updating a previously-created model based on a template are described. A template is generated from a previously-created model. The previously-created model specifies a set of parameters associated with a manufacturing process, a process tool or chamber. Variables associated with the manufacturing process are acquired, monitored, and analyzed. A statistical analysis (or multivariate statistical analysis) is employed to analyze the monitored variables and the set of parameters. When any of the monitored variables satisfy a threshold condition, a new model is created or the parameters of the previously-created model are updated, adjusted, or modified based on the template and the monitored variables. A user interface facilitating communication between a user and the systems and display of information is also described.

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Patent Owner(s)

Patent OwnerAddress
MKS INSTRUMENTS INC2 TECH DRIVE SUITE 201 ANDOVER MA 01810

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hadar, Ron Cupertino, US 70 9056
Hendler, Lawrence Cupertino, US 12 343
Kettaneh, Nouna Hollis, US 4 95
Lazarovich, Stela Diamant Herzlia Pituach, IL 4 93
Levami, Uzi Hod Hasharon, IL 10 64
Perlroizen, Dmitry Rehovot, IL 2 49

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