OPTIMIZED DIELECTRIC REFLECTIVE DIFFRACTION GRATING
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United States of America Patent
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Nov 29, 2012
app pub date -
Dec 13, 2010
filing date -
Dec 17, 2009
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Abstract
A method for producing a reflective diffraction grating. The diffraction grating includes a stack of at least four dielectric material layers, and an upper dielectric material layer that is etched to form grooves of the diffraction grating having a predetermined pitch, The diffraction grating is produced by selecting the number and the nature of the dielectric material layers, digitally computing the reflection and/or transmission efficiencies of at least one of the orders of diffraction of the diffraction grating for a sample of frequencies of the spectral range of use for each of several predetermined diffraction grating configurations while varying the thicknesses of the at least four layers and at least one of the etching parameters of the upper layer, and selecting, from among the computed configurations, at least one configuration depending on the use of the grating.
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