SUBSTRATE-SPLITTING DEVICE WITH DETECTION OF OBSTACLES
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United States of America Patent
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Issued Date -
Nov 29, 2012
app pub date -
May 18, 2012
filing date -
May 24, 2011
priority date (Note) -
Abandoned
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Abstract
A device for splitting substrates that include a cleavage plane therein. The device includes a base and a control device for performing controlled displacement of certain substrates. The control device includes at least one pusher that is mobile relative to the base. The pusher is adapted to accommodate substrates in a reception space thereon, and is capable of displacing substrates arranged above it in a substrates support. A detector is provided to determine the absence or the presence of obstacles inside at least one region of the reception space of the pusher when the pusher is in a detection position.
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