SUBSTRATE STORAGE CONTAINER
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United States of America Patent
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N/A
Issued Date -
Nov 29, 2012
app pub date -
Feb 14, 2011
filing date -
Feb 19, 2010
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A substrate storage container is disclosed that includes: a container body that stores semiconductor wafers W being supported by pairs of left and right supporting pieces; a removable door that opens and closes an open front of container body; and interface portions that are provided in the container body and the door and are connected to a load port apparatus of processing equipment. The door is positioned and connected to the load port apparatus when the open front of container body is opened and closed by the door. The container body, its paired supporting pieces, the door and the interface portions are all formed of conductive materials so that their surface resistance values are specified to fall within the range of 103 to 1012Ω, to thereby inhibit adherence of particles to these due to electrification of static electricity.
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