CONTINUOUS PROCESSING SYSTEM WITH PINCH VALVE
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United States of America Patent
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app pub date -
Jul 19, 2012
filing date -
Apr 3, 2009
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Abandoned
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Abstract
A pinch valve assembly includes a valve body having a slot which is configured to allow a web of substrate material to pass therethrough. The valve body has a sealing surface which includes a first curved portion with a first radius of curvature. A dynamic seal element is configured to engage the valve body and includes a second curved portion having a second radius of curvature which is larger than the first radius of curvature. An actuator is operable to selectively bias the dynamic seal element into and out of engagement with the valve body so that when it is biased into engagement with the valve body the web of substrate material is engaged between the sealing surfaces of the dynamic seal element and the valve body. Also disclosed are deposition systems which include these pinch valves.
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