HIGH DENSITY, HARD TIP ARRAYS
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United States of America Patent
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Issued Date -
Nov 22, 2012
app pub date -
May 16, 2012
filing date -
May 17, 2011
priority date (Note) -
Abandoned
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Abstract
Improved high density, hard tip arrays for use in patterning are provided. An article comprises a handle chip; and a silicon nitride membrane bonded to at least a portion of the handle chip. The silicon nitride membrane comprises an array of a plurality of silicon nitride tips extending directly from a surface of the silicon nitride membrane. Another article comprises an elastomeric backing member; and an array of tips disposed on the elastomeric backing member. The tips of the array comprise a refractory material. Methods of making such articles are also provided.
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