METHOD FOR DETERMINING THE CONCENTRATION OF NITRIC ACID

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United States of America Patent

APP PUB NO 20120292522A1
SERIAL NO

13576119

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The present invention relates to the field of wet chemical treatment of silicon substrates. The invention particularly relates to a method for the determination of the concentration of nitric acid in aqueous process solutions as being used for the treatment of substrates such as those made from silicon. The method is based on the determination of nitrate by means of UV spectroscopy/photometry with the aid of eliminating agents which effectively remove disturbing absorptions caused by other substances. Therein, the concentration of nitrate corresponds to that of nitric acid.

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Patent Owner(s)

Patent OwnerAddress
RENA GMBHGERMAN GU TEN BACH

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Reger, Hubert Tubingen, DE 2 7

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