Method for operating a vacuum Coating apparatus
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United States of America Patent
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Issued Date -
Nov 15, 2012
app pub date -
Mar 14, 2012
filing date -
Mar 15, 2011
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Abandoned
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Abstract
A method for operating a vacuum coating apparatus, in particular for producing thin-film solar cells, a layer deposition step being carried out, after a coating chamber cleaning step using a cleaning gas and before a product production step, in order to apply a diffusion barrier layer onto the walls of the coating chamber.
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