X-ray multiple spectroscopic analyzer
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United States of America Patent
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Dec 2, 2014
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app pub date -
May 4, 2012
filing date -
May 13, 2011
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Abstract
An X-ray multiple spectroscopic analyzer includes an X-ray source, an optical system inputting X-rays to a single-crystal sample, a sample stage supporting the single-crystal sample, an X-ray diffraction detector, a rotation driving system that changes the angle of the X-ray diffraction detector, an X-ray diffraction measurement data storage unit, a structural analysis data analyzing unit, an energy-dispersive X-ray fluorescence detector, an X-ray fluorescence measurement data storage unit, an X-ray fluorescence analyzing unit, an X-ray fluorescence analysis data storage unit, and X-ray fluorescence analysis data acquiring unit. The structural analysis data analyzing unit analyzes the data of the crystal structure further on the basis of the analysis data of the fluorescent X-rays output from the X-ray fluorescence analysis data acquiring unit.
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