Measuring Bulk Lifetime

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United States of America Patent

SERIAL NO

13292850

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Abstract

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A substrate is electromagnetically coupled into an inductance-capacitance resonant circuit formed from (i) a member comprising a ferromagnetic material, (ii) an inductor and (iii) the substrate. The substrate is illuminated for a first time period X to cause photoconduction in the substrate. Decay in conductivity of the substrate is monitored for a second time period Y. The ratio of X to Y is greater than 1:10. Bulk lifetime of the substrate is determined from the decay.

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Patent Owner(s)

Patent OwnerAddress
MKS INSTRUMENTS INC2 TECH DRIVE SUITE 201 ANDOVER MA 01810

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chiarello, Ronald Lafayette, US 5 33
Cornwell, David Chester, GB 2 31
Foster, Joseph W San Jose, US 6 339
Machuca, Francisco Oakland, US 18 59
Miller, G Lorimer Eastham, US 4 7
Tigwell, David C Houston, US 13 307

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