Mold Manufacture Method and Mold Formed by Said Method
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United States of America Patent
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Jun 28, 2012
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Mar 19, 2010
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Abstract
There are provided a mold manufacture method capable of easily manufacturing a mold having a nanosized fine structure, and a mold obtained using such method. The mold manufacture method includes: a step of forming a self-assembled film 2 on an inorganic thin film 1 having the fine structure, the self-assembled film 2 being composed of a silane coupling agent having a functional group including at least one of an amino group, a mercapto group, a thiol group, a disulfide group, a cyano group, a halogen group and a sulfonic acid group; a conductive layer formation step of forming a conductive layer 3 on the self-assembled film 2; and a step of forming a metal film 4 on the conductive layer 3 through electroplating.
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