Acoustic wave device having an inorganic insulator and an organic insulator
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United States of America Patent
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Aug 4, 2015
Grant Date -
Nov 8, 2012
app pub date -
Jan 20, 2011
filing date -
Jan 20, 2010
priority date (Note) -
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Abstract
An acoustic wave device includes a piezoelectric substrate, a first wiring disposed on an upper surface of the piezoelectric substrate, an organic insulator covering at least a portion of the first wiring, a second wiring disposed on a first portion of the upper surface of the organic insulator, and an inorganic insulator covering at least a second portion of an upper surface of the organic insulator. The second portion of the upper surface of the organic insulator faces an oscillation space across the inorganic insulator. The acoustic wave device has preferable high-frequency characteristics and high long-term reliability.
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