METHOD AND SYSTEM FOR EVALUATING A HEIGHT OF STRUCTURES
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United States of America Patent
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Issued Date -
Nov 1, 2012
app pub date -
May 1, 2012
filing date -
Mar 18, 2010
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Abandoned
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Abstract
A method and system for interference based detection of height (H) of a microscopic structure. Wherein N*(Ws/2)>H>(N−1)*(Ws/2); wherein N is a positive integer, w1 is a first wavelength of first light beams used to generate first interference patterns, w2 is a second wavelength of second light beams used to generate second interference patterns, and Ws is a synthetic wavelength and equals a ratio between (i) a product of a multiplication of w1 by w2 and (ii) a difference between w1 and w2.
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