IN-COLUMN DETECTOR FOR PARTICLE-OPTICAL COLUMN
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United States of America Patent
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Issued Date -
Nov 1, 2012
app pub date -
Apr 26, 2012
filing date -
Apr 26, 2011
priority date (Note) -
Abandoned
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Abstract
The invention relates to an in-column back-scattered electron detector, the detector placed in a combined electrostatic/magnetic objective lens for a SEM. The detector is formed as a charged particle sensitive surface, preferably a scintillator disk that acts as one of the electrode faces forming the electrostatic focusing field. The photons generated in the scintillator are detected by a photon detector, such as a photo-diode or a multi-pixel photon detector. The objective lens may be equipped with another electron detector for detecting secondary electrons that are kept closer to the axis. A light guide may be used to offer electrical insulation between the photon detector and the scintillator.
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