SURFACE PROTECTIVE FILM, GAS CONTACT MEMBER, GAS PROCESSING APPARATUS, AND MECHANICAL PUMP
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United States of America Patent
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Issued Date -
Nov 1, 2012
app pub date -
Nov 9, 2010
filing date -
Nov 26, 2009
priority date (Note) -
Abandoned
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Abstract
An object of this invention is to provide a surface protective film which is capable of suppressing the entry of a corrosive gas as compared with conventional surface protective films. A surface protective film according to this invention is a film which contains yttria (Y2O3) as a main component and also contains cerium. Since the surface protective film contains cerium, defects such as micropores in the film are reduced, thereby enabling suppression of the entry of a corrosive gas.
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