Metal-Organic Vapor Phase Epitaxy System and Process

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United States of America Patent

APP PUB NO 20120272892A1
SERIAL NO

13441531

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A VPE reactor is improved by providing temperature control to within 0.5° C., and greater process gas uniformity via novel reactor shaping, unique wafer motion structures, improvements in thermal control systems, improvements in gas flow structures, improved methods for application of gas and temperature, and improved control systems for detecting and reducing process variation.

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Patent Owner(s)

Patent OwnerAddress
VEECO INSTRUMENTS INCTERMINAL DRIVE PLAINVIEW NY 11803

International Classification(s)

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  • 2012 Application Filing Year
  • C30B Class
  • 390 Applications Filed
  • 342 Patents Issued To-Date
  • 87.70 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances201220132014201520162017201820192020202120220255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Gurary, Alexander Bridgewater, US 35 1598
Paranjpe, Ajit Basking Ridge, US 30 959
Quinn, William Whitehouse Station, US 11 274

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Patent Citation Ranking

  • 24 Citation Count
  • C30B Class
  • 84.05 % this patent is cited more than
  • 13 Age
Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges1916037169225112301 - 1011 - 2021 - 3031 - 4041 - 5051 - 6061 - 7071 - 8081 - 9091 - 100100 +0102030405060708090100110120130140150160170

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