Hydrogen Sensor
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United States of America Patent
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Issued Date -
Nov 1, 2012
app pub date -
Sep 18, 2007
filing date -
Sep 28, 2006
priority date (Note) -
Abandoned
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Abstract
A hydrogen sensor comprising:
- a substrate,a detection film which is formed on the substrate and is composed of a rare earth metal,a protection film which is formed on the detection film and is a dispersion of hydrogen-permeable metal particles in a ceramic material, anda pair of electrodes which is formed apart on the protection film and are electrically connected with the detection film via the protection film. The hydrogen-permeable metal particles are Pd, Pt, Nb, V and Ta and the preferable content thereof is 20 to 70% by mass. It is preferred that the resistance of the protection film between the electrodes is 10 to 100,000 Ω and that the resistance of the detection film in the interelectrode direction is smaller than the resistance of the protection film in the interelectrode direction.
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