DEVICE COMPRISING A GAS SENSOR SENSITIVE TO THE PRESENCE OF A SPECIFIC GAS, METHOD OF MANUFACTURING A GAS SENSOR SENSITIVE TO THE PRESENCE OF A SPECIFIC GAS FOR USE IN THE DEVICE AND USE OF THE DEVICE

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United States of America Patent

APP PUB NO 20120272721A1
SERIAL NO

13458712

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Abstract

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A device including a gas sensor sensitive to the presence of a specific gas is disclosed. In one aspect, the gas sensor includes a first segment made of a dielectric material and a second segment made of a semiconducting material. The first segment has a first surface exposed to an environment of the gas sensor and is located between the environment and the second segment. The first segment has a first thickness and the second segment has a second thickness. The first thickness is selected such that upon diffusion of a gas molecule of the specific gas into the first segment, a dipole of the molecule of the specific gas detectably influences a bending of an energy-band structure of the semiconducting material of the second segment. The second thickness is in the order of, or smaller than, the Debye length of the semiconducting material.

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Patent Owner(s)

Patent OwnerAddress
STICHTING IMEC NEDERLANDHIGH TECH CAMPUS 31 EINDHOVEN 5656 AE

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Blauw, Michiel Breda, NL 4 55
Brongersma, Sywert Eindhoven, NL 9 37
Crego, Calama Mercedes Geldrop-Mierio, NL 9 83
Kochupurackal, Jinesh Singapore, SG 5 38
Offermans, Peter Eindhoven, NL 16 81

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