SUSCEPTOR FOR SUPPORTING A SEMICONDUCTOR WAFER AND METHOD FOR DEPOSITING A LAYER ON A FRONT SIDE OF A SEMICONDUCTOR WAFER
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United States of America Patent
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Issued Date -
Oct 25, 2012
app pub date -
Mar 13, 2012
filing date -
Apr 19, 2011
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Abandoned
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Abstract
A susceptor for supporting a semiconductor wafer during deposition of a layer on a front side of the semiconductor wafer, the semiconductor wafer having a diameter D and, at its edge, a notch having a depth T, comprising:
- a ring-shaped placement area having an internal diameter d for the placement of the semiconductor wafer in the edge region of a rear side of the semiconductor wafer, wherein, with the semiconductor wafer having been placed, the relationship (D−d)/2
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