Method and Apparatus of Analyzing Sample Surface Data
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United States of America Patent
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Issued Date -
Oct 18, 2012
app pub date -
May 19, 2011
filing date -
Apr 15, 2011
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Abandoned
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Abstract
An improved apparatus and method for the analysis of surface data collected using a sub-micron scale metrology instrument which provides a persistent user experience by allocating set portions of the display to major functional regions thereby allowing a quick to learn and easy to user interface for the setup, analysis, and display of microscopic 3D surface data measurements and resulting analytic data with a variety of 3D surface scanners.
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