PROCESS FOR MANUFACTURING A STAND-ALONE MULTILAYER THIN FILM

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United States of America Patent

SERIAL NO

13527996

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Abstract

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A process for manufacturing stand-alone multilayer thin films is provided. The process includes providing a substrate, depositing a sacrificial layer onto the substrate and the depositing multilayer thin film onto the sacrificial layer. Thereafter, the substrate, sacrificial layer and thin film structure are exposed to chemical solutions. The chemical solution selectively reacts with the sacrificial layer to remove the sacrificial layer, thereby affording for an intact multilayer stand-alone thin film to separate from the substrate. The color and optical properties of the multilayer thin film are not affected by the removal of the sacrificial layer.

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Patent Owner(s)

Patent OwnerAddress
TOYOTA MOTOR CORPORATION1 TOYOTA-CHO TOYOTA AICHI 471-8571

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Banerjee, Debasish Ann Arbor, US 164 1614
Hancer-Ademuwagun, Ayse Ypsilanti, US 1 0
Ishii, Masahiko Okazaki City, JP 117 1577
Wu, Songtao Ann Arbor, US 95 639
Zhang, Minjuan Ann Arbor, US 96 1789

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