METHOD FOR FORMING TCO FILMS AND THIN FILM STACK
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United States of America Patent
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Issued Date -
Oct 11, 2012
app pub date -
Apr 6, 2011
filing date -
Apr 5, 2011
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Abandoned
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Abstract
A method for controlling surface morphology of a transparent conductive oxide film (TCO) is provided. A substrate is provided as a basis for forming a solar cell. Onto the substrate, a seed layer is deposited. Then, the method includes depositing the transparent conductive oxide film (TCO) above the seed layer. The seed layer is adapted to control the surface morphology of the transparent conductive oxide film. The surface of the transparent conductive oxide film is etched in order to provide a front contact of the solar cell.
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