Apparatus, method, and computer-readable medium for managing abnormality data measured in the substrate manufacturing process
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United States of America Patent
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Feb 28, 2017
Grant Date -
Oct 4, 2012
app pub date -
Mar 29, 2012
filing date -
Apr 1, 2011
priority date (Note) -
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Abstract
A management device includes a measurement data storage unit configured to store measurement data transmitted from a substrate processing apparatus; a setting unit configured to set an item of the measurement data as a determination target, reference data, and upper and lower limit values with respect to the reference data; a counting unit configured to count the number of times that the value of the measurement data corresponding to the item exceeds the upper and lower limit values; and a determining unit configured to determine that the measurement data as a determination target is abnormal, when the counted number exceeds a predetermined value.
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