ANTIREFLECTIVE COATING COMPOSITION AND PROCESS THEREOF

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United States of America Patent

APP PUB NO 20120251943A1
SERIAL NO

13075749

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Abstract

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The invention relates to an antireflective coating composition comprising a crosslinker and a crosslinkable polymer capable of being crosslinked by the crosslinker, where the crosslinkable polymer comprises a unit represented by structure (1):

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Patent Owner(s)

Patent OwnerAddress
AZ ELECTRONIC MATERIALS USA CORP70 MEISTER AVENUE SOMERVILLE NJ 08876

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cho, Joon Yeon Bridgewater, US 6 36
McKenzie, Douglas Easton, US 30 327
Mullen, Salem K Florham Park, US 17 200
Rahman, M Dalil Flemington, US 91 862
Shan, Jianhui Pennington, US 28 331

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