REACTOR AND METHOD FOR PRODUCTION OF SILICON
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United States of America Patent
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Oct 4, 2012
app pub date -
Nov 25, 2010
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Nov 25, 2009
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Abstract
Reactor for production of silicon, comprising a reactor volume, distinctive in that the reactor comprises or is operatively arranged to at least one means for setting a silicon-containing reaction gas for chemical vapor deposition (CVD) into rotation inside the reactor volume. Method for production of silicon.
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