Process Module for the Inline-Treatment of Substrates
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United States of America Patent
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Issued Date -
Oct 4, 2012
app pub date -
Jun 14, 2010
filing date -
Jun 19, 2009
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Abandoned
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Abstract
The present invention relates to an apparatus and a method for the fluidic inline-treatment of flat substrates with at least one process module. In particular, the invention relates to such a treatment during the gentle and controlled transport of the substrates, wherein the treatment can also just relate to the transport of the substrates.
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