SAW SENSOR
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United States of America Patent
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Issued Date -
Sep 27, 2012
app pub date -
Aug 8, 2008
filing date -
Aug 9, 2007
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
Provided is a surface acoustic wave (SAW) sensor sensing pressure, temperature, etc., by using a SAW. The SAW sensor includes: a substrate having one of its surfaces formed with a cavity having a predetermined depth; a piezoelectric plate which has piezoelectricity, so as to make a SAW, and which is adhered to the surface in which the cavity is formed, so as to cover the cavity of the substrate; a pressure resonator which is installed to a portion of the piezoelectric plate that corresponds to the cavity groove, and which generates a SAW due to a radio frequency (RF) signal applied thereto; and a reference resonator which is installed to the piezoelectric plate to be outside the portion corresponding to the cavity and be parallel to the pressure resonator, and which generates a SAW due to the RF signal applied thereto.
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