Importance

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Abstract

Disclosed in this invention is a controlling device for abnormality prediction of semiconductor processing equipment. The controlling device includes a multiplexer connecting a plurality of vibration sensors to a spectrum analyzer. Therein, the vibration sensors are non-destructively installed to a variable-frequency rotating mechanism inside the semiconductor processing equipment. The multiplexer includes an adapter and at least a modularized multi-channel connecting assembly plugged into the adapter where the number of the connected vibration sensors is less than the number of the signal connecting terminals of the multiplexer so that at least one terminal is unconnected with the vibration sensors. Additionally, a control signal wire connects the unconnected terminal to a corresponding controller of the variable-frequency rotating element. The vibration spectrum analyzer is configured to record and collect both vibration signals and control signals where these signals are transformed into time-domain waveforms to track the lifetime of the equipment, to predict the failure of the equipment, and to reduce equipment down time, parts waiting time, and equipment repair time of the semiconductor processing equipment.

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First Claim