METHOD AND SYSTEM FOR PROVIDING A SIDE SHIELD FOR A PERPENDICULAR MAGNETIC RECORDING POLE
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United States of America Patent
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N/A
Issued Date -
Sep 20, 2012
app pub date -
Mar 18, 2011
filing date -
Mar 18, 2011
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A method for fabricating a magnetic transducer having a nonmagnetic intermediate layer is described. A pole is provided on the intermediate layer. The pole has sides, a bottom, a top wider than the bottom and a leading bevel proximate to an ABS location. A side gap is provided adjacent to at least the sides of the pole. A bottom antireflective coating (BARC) layer is provided on the intermediate layer. The BARC layer is removable using a wet etchant and is adjacent to at least a portion of the side gap. A mask layer is provided on the BARC layer. A pattern is photolithographically transferred into the mask layer, forming a shield mask. Part of the BARC layer is exposed to the wet etchant such that the sides of the pole and the side gap are free of the BARC layer. At least a magnetic side shield is provided.
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Cited Art Landscape
Patent Citation Ranking
- 155 Citation Count
- G03F Class
- 99.11 % this patent is cited more than
- 13 Age