PROCESS OF PURIFYING RUTHENIUM PRECURSORS
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United States of America Patent
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Issued Date -
Sep 13, 2012
app pub date -
Sep 12, 2011
filing date -
May 8, 2008
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Abstract
Disclosed are methods of purifying a ruthenium containing precursor by removing oxygen from the ruthenium containing precursor by flowing an inert gas through the ruthenium containing precursor. Also disclosed are methods of forming an improved ruthenium containing film using the purified ruthenium containing precursor.
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