SEMICONDUCTOR DEVICE WITH RESISTANCE CIRCUIT

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United States of America Patent

APP PUB NO 20120228719A1
SERIAL NO

13417425

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Provided is a resistance circuit having a resistance element with high resistance and high accuracy. An insulating film such as a silicon nitride film is formed on the resistance element made of a thin film material whose thickness is reduced to 500 Å or smaller. The insulating film prevents passing through of the contact hole arranged on the resistance element during etching for forming the contact hole.

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Patent Owner(s)

Patent OwnerAddress
SII SEMICONDUCTOR CORPORATION8 NAKASE 1-CHOME MIHAMA-KU CHIBA-SHI CHIBA 261-8507

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
HARADA, Hirofumi Chiba-shi, JP 59 448

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