SYSTEM FOR MEASURING ABSOLUTE QUANTITY OF EACH COMPONENT OF GAS USING QMS

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20120216598A1
SERIAL NO

13510547

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Abstract

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The present invention relates to a system for measuring an absolute quantity of each component of a gas using a QMS, more particularly to a system for measuring an absolute quantity of each component of a gas using a QMS, which is capable of performing not only a qualitative analysis but also a quantitative analysis in an accurate manner, using just a trace amount of gas introduced through a pinhole. According to the present invention, the productivity of products can be improved, and production management can be performed in an efficient manner, thereby improving industrial competitiveness.

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Patent Owner(s)

Patent OwnerAddress
KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE267 GAJEONG-RO YUSEONG-GU DAEJEON 34113 34113
EL INC#504 96 GAJEONGBUK-RO YUSEONG-GU DAEJEON 34111

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Joh, Seong Kweon Seoul, KR 1 0
Kim, Jin Seong Daejeon, KR 94 598
Kim, Kwang Seob Daejeon, KR 15 62
Lee, Jin Bok Daejeon, KR 10 26
Lee, Keu Chan Daejeon, KR 2 0
Moon, Dong Min Daejeon, KR 3 1
Park, Won Young Daejeon, KR 2 0
Yoon, Seok Rae Anyang-si, KR 2 0

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