Semiconductor device having plural penetration electrodes penetrating through semiconductor substrate and testing method thereof
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United States of America Patent
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May 6, 2014
Issued Date -
N/A
app pub date -
Feb 16, 2012
filing date -
Feb 22, 2011
priority date (Note) -
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Abstract
Disclosed herein is a device that includes first and second current paths, first and second latch circuits electrically connected to the first and second current paths, respectively, a driver circuit supplying first data to the first latch circuit, and supplying second data representing a logical value opposite to a logical value of the first data to the second latch circuit, a control circuit controlling the driver circuit to be alternately and repeatedly in a first period in which the driver circuit supplies the first data to the first latch circuit and does not supply the second data to the second latch circuit, and in a second period in which the driver circuit supplies the second data to the second latch circuit and does not supply the first data to the first latch circuit, and a monitor circuit.
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