Calibratable magnetic field sensor and method of producing same
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United States of America Patent
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Aug 25, 2015
Grant Date -
Aug 23, 2012
app pub date -
Feb 17, 2012
filing date -
Feb 18, 2011
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Abstract
Magnetic field sensor having a vertical Hall sensor element arranged in a semiconductor substrate, and an exciting conductor arrangement having at least one exciting conductor, the exciting conductor being arranged within an exciting conductor plane which is spaced apart, in parallel to the substrate surface, from the vertical Hall sensor element at a vertical distance h1 having a tolerance range Δh1 which is due to the manufacturing process, and which exciting conductor further has a lateral distance d1 as an offset from a center position which is located, in relation to the substrate surface, perpendicularly to the vertical Hall sensor element, and the lateral distance d1 being dimensioned such that a vertical calibration component B1x of a magnetic flux density B1 created by the exciting conductor arrangement in the vertical Hall sensor element changes by less than 5% within the tolerance range Δh1 for the vertical distance h1.
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