FLUID CONTROL DEVICE AND PRESSURE CONTROL DEVICE
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United States of America Patent
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N/A
Issued Date -
Aug 16, 2012
app pub date -
Feb 15, 2012
filing date -
Feb 15, 2011
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A fluid control device that can, with a digitally controlled valve controller, achieve responsiveness close to conventional analog control is provided with: a fluid control valve in a flow path through which fluid flows; fluid measurement parts that measure a physical quantity related to the fluid; and a valve controller configured to control, on the basis of a deviation between a physical quantity value measured in the fluid measurement part and a preliminarily set setting value, a fluid control valve's opening level by digital control. The valve controller 4 is provided with: an operation amount calculation part configured to perform calculation on an inputted value to output a value related to an operation amount for the opening level of the fluid control valve; and a phase compensation part configured to output a value obtained by compensating an inputted value for a phase shift by velocity type digital calculation.
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