METHOD FOR ETCHING OF SILICON SURFACES

United States of America Patent

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Issued Date
Aug 16, 2012
app pub date
Jun 2, 2010
filing date
Aug 20, 2009

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Abandoned

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Abstract

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The invention relates to a method for etching of silicon surfaces with the following steps:

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Patent Owner	Address
RENA GMBH	GERMAN GU TEN BACH

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H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....

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Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
El, Jaouhari Ahmed Abdelbar	Neunkirchen am Brand, DE	1	0
Schweckendiek, Jürgen	Berlin, DE	1	0

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METHOD FOR ETCHING OF SILICON SURFACES

Number of patents in Portfolio can not be more than 2000

United States of America Patent

13390081

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13390081

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