WORKPIECE TRANSFER SYSTEM AND FRAME STRUCTURE FOR TRANSFER CHAMBER
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United States of America Patent
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Issued Date -
Aug 9, 2012
app pub date -
Jan 18, 2012
filing date -
Feb 4, 2011
priority date (Note) -
Abandoned
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Abstract
A workpiece transfer system includes a transfer chamber in which a workpiece transfer apparatus is installed, and a load port provided adjacent to the transfer chamber. The transfer chamber includes a frame structure made of steel. The frame structure includes a first frame member and a second frame member. The first frame member is set on the floor, and the workpiece transfer apparatus is installed thereon. The second frame member is arranged in a standing posture with respect to the first frame member and which supports the load port.
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